Trichlorosilane (SiHCl3) is an important chemical in the manufacturing industry, but with long-term exposure, it can seriously affect the health of workers. This article will analyze the health impacts of trichlorosilane and preventive measures in the work environment.
1. What is Trichlorosilane (Silane, trichloro-)?
Trichlorosilane, with the chemical formula SiHCl₃, is an important inorganic compound in the semiconductor and silicon material production industries. It exists as a colorless, volatile liquid with a characteristic odor of hydrochloric acid. Trichlorosilane is produced mainly through the reaction between metallic silicon and hydrogen chloride (HCl) gas at a temperature of about 300°C, according to the chemical equation:
Si + 3 HCl → SiHCl₃ + H₂
This process produces trichlorosilane along with hydrogen gas. The trichlorosilane is then distilled to remove impurities such as silicon tetrachloride (SiCl₄) and dichlorosilane (H₂SiCl₂), in order to achieve high purity for industrial applications.
However, trichlorosilane is a very reactive chemical and can be hazardous if not handled properly. It reacts violently with water, producing hydrochloric acid and hydrogen gas, so it must be stored and used in a strictly controlled environment to ensure the safety of workers and the environment.
| No. | Chemical Name in Vietnamese | Chemical Name in English | HS Code | CAS Number | Chemical Formula |
| 1. | Triclo silan | Trichlorosilane (Silane, trichloro-) | 28539000 | 10025-78-2 | SiHCl3 |
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2. Where does Trichlorosilane (Silane, trichloro-) originate from in the production process?
During the production process, trichlorosilane primarily originates from the reaction between metallic silicon and hydrogen chloride. This process takes place in special reactors, where the raw materials are introduced and react at a high temperature, around 300°C. Metallic silicon, usually sourced from natural sand or silicon-containing ores, is exposed to hydrogen chloride gas. When the reaction occurs, trichlorosilane is formed along with hydrogen gas.
The trichlorosilane product is further processed through distillation steps to remove impurities such as silicon tetrachloride and other compounds. This process ensures that the obtained trichlorosilane achieves high purity, suitable for applications in the electronics and silicon materials industries.

3. Industries that use Trichlorosilane (Silane, trichloro-) in production
Trichlorosilane is widely used in many manufacturing industries, particularly in the fields of semiconductor material fabrication and silicon production. One of the industries that uses a large amount of trichlorosilane is the electronics industry, especially in the production of silicon wafers. Pure silicon, extracted from trichlorosilane, is a crucial raw material for manufacturing semiconductor components, electronic chips, and microcircuit devices.
In addition, trichlorosilane is also applied in the glass and building materials industries, especially in the production of materials with water-repellent and anti-stain properties. Trichlorosilane is also used in surface coating technologies to create a silicon dioxide layer on products such as glass, plastic, or metal, which helps to increase the durability and functionality of the material.
In the energy production sector, trichlorosilane also plays a role in the manufacturing of solar panels. Pure silicon extracted from trichlorosilane is the main component in solar energy panels, contributing to the development of the renewable energy industry.
4. How does Trichlorosilane (Silane, trichloro-) affect workers?
When workers are exposed to trichlorosilane in the work environment, they can face many health risks. Trichlorosilane is a volatile chemical and can be harmful when inhaled or in direct contact with the skin and eyes. Inhaling trichlorosilane vapor can cause respiratory irritation, leading to symptoms such as coughing, shortness of breath, and pneumonia. In cases of long-term exposure or high concentrations, it can cause serious damage to the respiratory system and other internal organs.
Direct contact with the skin or eyes can also cause allergic reactions or irritation, including redness, swelling, burning, or blurred vision. In addition, this substance can react with water to produce hydrochloric acid, a very corrosive substance, which can cause severe damage if not treated promptly. In some cases, long-term exposure to trichlorosilane can lead to more serious health problems such as hepatitis or kidney damage.
5. Permissible safe concentration of Trichlorosilane (Silane, trichloro-) for human exposure
The permissible safe concentration of trichlorosilane for human exposure is regulated by occupational safety agencies such as OSHA (U.S. Occupational Safety and Health Administration) and ACGIH (American Conference of Governmental Industrial Hygienists). According to OSHA, the permissible exposure limit for trichlorosilane in the air is regulated at 0.5 parts per million (ppm) for an 8-hour workday (TWA – Time Weighted Average). This is the maximum concentration that a worker can be exposed to over an 8-hour shift without adverse health effects.
At higher concentrations, it can cause negative health effects, including irritation of the eyes, skin, and respiratory system. Studies also indicate that trichlorosilane concentrations exceeding 1 ppm can lead to symptoms such as coughing, shortness of breath, and chest pain. To protect the health of workers, factories using trichlorosilane need to ensure good ventilation systems and air quality control measures to keep trichlorosilane levels within the permissible safe limits.

On a basic level, if working in an industrial environment, adhering to safety standards and limiting exposure to Trichlorosilane is important. Organizations like the Occupational Safety and Health Administration (OSHA) in the United States provide guidelines and safety principles to protect workers from the negative impacts of chemical substances.
6. Measures to minimize the health effects of Trichlorosilane (Silane, trichloro-) on workers
To minimize the health effects of trichlorosilane on workers, manufacturing plants need to implement a series of protective and environmental control measures. One of the most important measures is to ensure an effective ventilation system, which helps reduce the concentration of trichlorosilane in the air and limit the accumulation of this chemical. The use of exhaust systems, natural ventilation, and mechanical ventilation in high-risk areas will help maintain air quality at safe levels.
In addition, providing workers with adequate personal protective equipment is essential. Workers should be supplied with respirators with appropriate filters, safety goggles, chemical-resistant gloves, and full-body protective clothing to limit direct contact with trichlorosilane. Particularly in areas with a high risk of exposure, the use of this protective equipment is mandatory.
Work procedures also need to be standardized and closely monitored. Employees should be trained in emergency response methods, such as how to handle a trichlorosilane leak or what to do if a worker is exposed to the chemical. Besides, regular checks and monitoring of trichlorosilane concentrations in the air must be conducted to ensure they do not exceed safe limits.
Finally, factories need to establish a timely warning and alarm system for when trichlorosilane concentrations in the air exceed permissible levels, to ensure worker safety and to halt operations if necessary.
Occupational safety training: Workers need to be trained and educated on the risks and safety measures when working with this type of chemical. This training should be provided periodically and regularly to ensure understanding and proper compliance with safety rules.
Periodically organize occupational environment monitoring in factories and enterprises, collect and analyze factors harmful to workers, thereby adjusting to reduce the level of hazard to prevent occupational diseases for them.
7. National Occupational Environment Monitoring Center
Nam Viet’s Occupational Environment Monitoring Center is a professional unit for monitoring and measuring the quality of the working environment across all provinces in Vietnam. With a team of experienced monitoring specialists, the center uses modern measuring equipment, ensuring accuracy and reliability.
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In addition to providing monitoring services, the center also assists clients in planning, handling, and tracking occupational environment issues. With the motto “the customer is the center,” the center focuses on customer satisfaction, meets all customer needs, and is committed to providing the best solutions for businesses.
With investment in technology, engineering, and human resources, Nam Viet’s monitoring center has become one of the reputable units in the field of occupational environment monitoring in Ho Chi Minh City with the following objectives:
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- With a team of experienced Masters and Engineers with a desire to protect the environment and benefit businesses.

- With the Nam Viet Environmental Monitoring team, your company will receive professional service from experts in the monitoring field. You will also get the best cost incentives.
8. Quotation for Occupational Environment Monitoring
To help businesses carry out occupational environment monitoring professionally and effectively, Nam Viet offers our customers a quality and reasonably priced quotation table for occupational environment monitoring services.
- Our quotation table provides detailed information about the prices of the monitoring services we offer. This includes costs related to travel, measurement, analysis, and reporting of results. Customers can be completely assured of the accuracy and reliability of the monitoring result reports we provide.
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