Dichlorosilane (Cl₂H₂Si) is an important chemical in industrial production, but it also poses many health risks to workers. Long-term exposure can cause respiratory irritation, skin damage, and other serious problems. This article will help you understand the effects of this chemical and how to protect yourself!
1. What is Dichlorosilane (silane, dichloro-)?
Dichlorosilane (silane, dichloro-) has the chemical formula Cl₂H₂Si. It is a chemical compound belonging to the silane group, in which a silicon atom is bonded to two chlorine atoms and two hydrogen atoms. It is a colorless, volatile liquid with a characteristic pungent odor and is commonly used in the semiconductor industry, electronic materials manufacturing, and the production of thin silicon films.
This compound is highly reactive, especially when it comes into contact with water vapor or moist air, it can decompose and produce hydrochloric acid (HCl), a highly corrosive substance. This makes dichlorosilane a hazardous chemical, requiring strict storage and handling procedures to ensure safety.
Additionally, because it contains a silicon atom, dichlorosilane plays a crucial role in the chemical vapor deposition (CVD) process, helping to create a silicon film layer on various surfaces. This application is particularly common in the manufacturing of electronic microcircuits and semiconductor devices, which require high precision and purity in each material layer.
No. | Chemical Name in Vietnamese | Chemical Name in English | HS Code | CAS Number | Chemical Formula |
1. | Dichlorosilan (silan, dichloro-) | Dichlorosilane (silane, dichloro-) | 28530000 | 4109-96-0 | Cl2H2Si |
See more: chemical safety training services according to Decree 113/2017/ND-CP
REGISTER FOR CHEMICAL OCCUPATIONAL SAFETY TRAINING ACCORDING TO DECREE 113
2. Where does Dichlorosilane (silane, dichloro-) originate from in the production process?
In industrial production processes, Cl₂H₂Si is primarily generated from chemical reactions between silane (SiH₄) or silicon with chlorine-containing compounds, such as hydrogen chloride (HCl) or chlorine (Cl₂). This process typically takes place in a controlled environment to ensure high product yield and purity.
One of the main sources of this compound is the semiconductor and electronic microcircuit manufacturing industry. Here, it is synthesized and used in the chemical vapor deposition (CVD) process to create silicon coatings on the surface of semiconductor materials. In these factories, Cl₂H₂Si can be released from gas delivery systems, reaction chambers, or during transport and storage if not strictly controlled.
Additionally, in the production of high-tech ceramics and some special silicon compounds, Cl₂H₂Si can also be generated as an intermediate or byproduct. When leaks or spills occur during production, this chemical can come into contact with moist air, causing a reaction that produces HCl gas and other corrosive substances, increasing the risk of air pollution within the factory.
3. Industries that use Dichlorosilane (silane, dichloro-) in production
In the semiconductor and electronic microcircuit industry, Cl₂H₂Si is widely used in the chemical vapor deposition (CVD) process to create pure silicon film layers on the surface of wafers, helping to improve the performance and precision of microcircuits. This is one of the most important applications of this compound, contributing to the development of modern electronic technology.
In the manufacturing of display screens, especially liquid crystal displays (LCD) and OLED technology, Cl₂H₂Si plays a crucial role in surface treatment and creating protective coatings. The use of this compound helps control the physical and chemical properties of materials, ensuring that the product quality meets high standards.
Furthermore, in the high-tech ceramics industry, Cl₂H₂Si is used in the production of advanced ceramic materials that have high heat resistance and corrosion resistance. The synthesis of silicon-containing compounds requires the use of Cl₂H₂Si as an intermediate to create products with special mechanical and chemical properties.
Besides, the chemical industry also utilizes Cl₂H₂Si to produce other silicon compounds for various fields, including protective coatings, adhesives, and waterproofing materials. The presence of this compound in chemical production processes requires strict control to ensure the safety of workers and the working environment.
4. How does Dichlorosilane (silane, dichloro-) affect workers?
Workplace exposure to Cl₂H₂Si can cause many negative health effects for workers, especially without appropriate protective measures. This compound is corrosive and reacts strongly with water vapor in the air, producing hydrogen chloride (HCl) gas, a substance that is severely irritating to the respiratory system and skin.
When inhaling Cl₂H₂Si vapor, workers may experience symptoms such as coughing, difficulty breathing, a sore throat, and nasal irritation. In cases of high-concentration exposure, this chemical can cause lung damage, bronchitis, or even pulmonary edema, severely impairing respiratory function. Individuals with a history of respiratory diseases are at a higher risk of being severely affected.
Direct contact with Cl₂H₂Si on the skin can cause chemical burns, skin irritation, rashes, or blistering. If this chemical gets into the eyes, it can cause conjunctivitis, severe pain, and even lead to corneal damage if not treated promptly.
Furthermore, long-term work in an environment containing Cl₂H₂Si vapor without adequate ventilation and protection can lead to chronic poisoning. Workers may experience symptoms such as fatigue, reduced respiratory function, damage to mucous membranes, and an increased risk of diseases related to the lungs and upper respiratory tract.
5. Permissible safe concentration of Dichlorosilane (silane, dichloro-) for human exposure
Currently, no specific information regarding a safe exposure concentration for Dichloro silane has been found in Vietnamese legal documents. Therefore, determining a safe level of exposure to Dichloro silane requires referencing international standards and best practices in the industry.
At a basic level, when working in an industrial environment, it is important to comply with safety standards and limit exposure to Dichlorosilane (silane, dichloro-). Organizations such as the Occupational Safety and Health Administration (OSHA) in the United States provide guidelines and safety principles to protect workers from the negative effects of chemical substances.
6. Measures to mitigate the effects of Dichlorosilane (silane, dichloro-) on workers’ health
Minimizing the health effects of Cl₂H₂Si on workers requires the application of strict control measures during the production, storage, and use of this chemical. One of the key solutions is to establish an effective ventilation system in the work area to reduce the concentration of chemical vapor in the air, limiting the risk of inhaling toxic gas. Local exhaust systems should be installed near the points of Cl₂H₂Si generation to control its release into the surrounding environment.
In addition, workers need to be fully equipped with personal protective equipment, including chemical-resistant respirators, corrosion-resistant gloves, safety goggles, and specialized clothing. Using a respirator with an appropriate filter is necessary when working in high-risk areas to prevent the inhalation of harmful vapors.
Occupational safety training is a crucial part of mitigating the impact of Cl₂H₂Si. Workers need to be trained on safe work procedures, how to handle chemical leaks, and first aid measures in case of exposure to Cl₂H₂Si. Regularly conducting emergency drills helps to raise awareness and ensure a quick response in the event of an incident.
Furthermore, it is necessary to conduct periodic monitoring of Cl₂H₂Si concentrations in the workplace air to ensure they remain within safe limits. Gas sensors and early warning systems should be used to detect the presence of toxic gas, helping to prevent overexposure. At the same time, applying alternative measures or using less hazardous chemicals is also an effective approach to protect workers’ health in the long run.
Occupational safety training: Workers need to be trained and educated on the risks and safety measures when working with this type of chemical. This training should be provided periodically and frequently to ensure understanding and proper compliance with safety rules.
Periodically organize workplace environment monitoring in factories and enterprises, collecting and analyzing factors harmful to workers, thereby adjusting to reduce hazard levels to prevent occupational diseases for them.
7. National Center for Workplace Environment Monitoring
The Workplace Environment Monitoring Center of Nam Viet is a professional unit specializing in the supervision and measurement of workplace environment quality across all provinces in Vietnam. With a team of experienced monitoring specialists, the center uses modern measuring equipment, ensuring accuracy and reliability.
REGISTER FOR WORKPLACE ENVIRONMENT MONITORING SERVICES
In addition to providing monitoring services, the center also assists clients in planning, handling, and tracking workplace environment issues. With the motto “the customer is the center,” the center focuses on customer satisfaction, meeting all customer needs, and is committed to providing the best solutions for businesses.
With investment in techniques, technology, and human resources, Nam Viet’s monitoring center has become one of the reputable units in the field of workplace environment monitoring in Ho Chi Minh City with the following objectives:
- We always value our brand reputation and the quality of our products and services.
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- With a team of experienced Masters and Engineers, we desire to protect the environment and benefit businesses.

- With the Nam Viet Environmental Monitoring team, your company will receive professional service from experts in the monitoring field, along with the best cost incentives.
8. Price Quote for Workplace Environment Monitoring
To help businesses conduct workplace environment monitoring professionally and effectively, Nam Viet offers our clients a price list for quality and reasonably priced workplace environment monitoring services.
- Our price list provides detailed information on the costs of the monitoring services we offer. It includes all related costs for travel, measurement, analysis, and reporting of results. You can be completely assured of the accuracy and reliability of the monitoring result reports we provide.
- We are committed to always offering the most competitive and reasonable prices on the market, and we are always ready to provide quick and professional consultation and answer any questions about our monitoring services.
- With Nam Viet’s price list, you can easily choose service packages that suit your needs. We are committed to bringing you the highest satisfaction with our professional service quality.